Mark Heiden
Nanofabrication Facility Manager
Nanofabrication Facility Manager
Positions Held:
- 8/97-11/02
General Manager, Hi Q Engineering, Ontario, CA - 8/92-7/97
Product Manager, MTI Technology Corp, Anaheim, CA - 1/88-8/92
Special Projects Manager, Hi Q Engineering, Ontario, CA - 8/82-1/88
Senior Production Manager, General Precision Ind., Irvine, CA - 7/76-8/82
Technical Support Manager, Statek Corp., Orange, CA
Research Interests:
Nanoscale and MEMS device fabrication, Laboratory monitoring and management systems.
Professional Experience:
Over 25 years experience in all aspects of the quartz crystal device and MEMS sensor research and development, design/test and manufacturing including:
- Facilities design, construction and maintenance
- Photolithography
- Quality assurance and process control
- Equipment refurbish, design modification and maintenance
- Clean room design, construction and maintenance
- Process engineering/development
- Wafer grinding/polishing
- E-beam metallization
- Thermal metallization
- UV/Ozone cleaning
- Chemical etching
- Metrology
Email: mheiden@engr.ucr.edu
Extension: 2551