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UC Riverside

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  • Cleanroom User Resources

Cleanroom User Resources

Shedding

 

  • Forms: Download User Forms
  • Lab User Verification Form
  • Safety Documents: Download Safety Related Docs
    • Toxic Gas Acknowledgement
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  • Lithography: Process Related Downloads
    • Microposit 351 Developer
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  •  Resources for Deposition
    • Material Deposition Table
    • Evaporation Sources
    • E-Beam Evaporation
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  • Dry Etching 
    • Dry Etching By Material
    • Etch Process for Microsystems Pt.1
    • Etch Process for Microsystems Pt. 2
  • Metrology
    • AFM Basics
    • Ellipsometry
    • Refractive Index Database
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Riverside, CA 92521

Tel: (951) 827-1012

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Bourns College of Engineering

Bourns B120B
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Riverside, CA 92521

tel: (951) 827-2551
fax: (951) 827-2233

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